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Αντλίες Χαμηλού Κενού 1000 - 0,1mbar

Rotary Vane pumps with pumping speeds of from 5 to 1,000 m3/h

Space-saving and ideal for systems integration    High pumping speeds with small dimensions

Easy to maintain

Low ultimate pressure (up to 0.2 hPa) 

Diaphragm pumps with a pumping speed of up to 4 l/min:

Absolutely oil-free

Pumping of dry an noncorrosive gases

Long service life of diaphragms and valves

Very quiet

As a backing pump for turbopumps and stand-alone version applicable

Piston Pumps

Oil-free vacuum pump with pumping speeds of 7.5 to 13 m3/h. The XtraDry, as a dry vacuum pump, is ideally suited for applications

of down 10-1 hPa that involve the need to pump dry,  

inert and non-reactive gases.

In all, an extremely clean design!

Gas independent pumping characteristics

No gas backstreaming in the pumping system

Particle-free - No process contamination

Hydrocarbon-free - Oil-free pumping system

Vent-safe - No sudden air inrush in the event of a power failure

Automatic standby mode - Saves energy without any impact on ultimate pressure

Dry Screw Pumps.

Complete series of pumps with pumping speeds from 100 to 600 m3/h

Optimum ultimate pressure and broadest range of applications

Absolutely dry and oil-free

Water cooling with thermostatic valve

Lower energy costs due to efficient internal compression

High-quality axial face seals

Direct gas flow minimizes deposits

Low energy consumption, low noise level

Roots pumps

Complete line of Roots pumps offers optimum flexibility and maximum process capability

Fast evacuation thanks to high compression ratio

Maintenance free, maximum reliability and highest availability thanks to magnetic coupling (optional)

Process adaptation and energy savings are possible thanks to frequency converter operation (optional)

Low operating costs thanks to convection cooling and magnetic coupling (optional)

Multi-stage Roots pumps by Pfeiffer Vacuum produce clean and dry vacuum for various applications and markets.

The solution for clean and dry applications
Multi-stage Roots pumps by Pfeiffer Vacuum are used in different areas of application. 

Small ACP-Roots pumps create, for example, the required fore-vacuum for turbopumps in particle accelerators. 

​Large ACP 120 with their high pumping speed and low final pressure are used in freeze-drying applications. 

The A 100, A3P or A3H series dry pumps are used in large numbers as process pumps in the semiconductor and coating industry. 

Nevertheless, all of these areas have one thing in common: they require a clean and dry vacuum. 

The technology of the multi-stage Roots pumps is the perfect solution here.

Lubricants and sealing material between the rotor and stator are not required by the frictionless working pumping module. 

Thus, hydrocarbon vapor backstreaming can be avoided. In the suction chamber of the pumps, no sealing materials are processed. 

​This means the pumps are free of particles, extremely reliable and stable for a long period of time which results in low cost of ownership.




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