| VCM 600 Model STANDARD | |||
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 3 sources Base Plate with shutter and Thickness monitor |
 2 sources Base Plate with shutter and Thickness monitor |
 Substrate Rotation and Thickness monitor |
 SS chamber with view port |
| VCM 600 Model BASIC | |||
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3 sources Base Plate with shutter and Thickness monitor |
2 sources Base Plate with shutter and Thickness monitor |
Substrate Rotation and Thickness monitor |
SS chamber with view port |
| EVP 3030-02 | |||
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 1 source Base Plate with Thickness Monitor |
 1 source Base Plate with Thickness Monitor |
| EVP 3030 | |||
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| Turbo micro | |||
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Turbo Micro with Janis Cryostat | |
| Turbo Vacuum Station | |||
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| Laboratory Systems | |||
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| Industrial Vacuum and Leak Detection Systems | |||
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